Optical microscope expanded depth of field using dynamic focusing lens for micro parts assembling

摘要

We have developed a microscope using a dynamic focusing lens suitable for micro parts assembling. With the microscope, real-time observation of thee-dimensional micro parts was achieved. The dynamic focusing lens consists of a thin glass diaphragm having a specific thickness profile, a metal diaphragm with a glass plate, transparent liquid, and PZT unimorph actuators. When the actuators push the metal diaphragm, the pressure of the transparent liquid bends the glass diaphragm.