机译:非接触式晶圆上MEMS表征和生产监控的测试方法
Institute for Electronics Engineering, Friedrich–Alexander University of Erlangen–Nuremberg, Erlangen, Germany;
Institute for Electronics Engineering, Friedrich–Alexander University of Erlangen–Nuremberg, Erlangen, Germany;
Institute for Electronics Engineering, Friedrich–Alexander University of Erlangen–Nuremberg, Erlangen, Germany;
Institute for Electronics Engineering, Friedrich–Alexander University of Erlangen–Nuremberg, Erlangen, Germany;
Institute for Electronics Engineering, Friedrich–Alexander University of Erlangen–Nuremberg, Erlangen, Germany;
Institute for Electronics Engineering, Friedrich–Alexander University of Erlangen–Nuremberg, Erlangen, Germany;
Micromechanical devices; Microphones; Electrodes; Force; Semiconductor device measurement; Optical sensors; Millimeter wave measurements;
机译:非接触式测量和测试技术与新型全硅光学测试和表征方法的比较
机译:MEMS压力传感器批量生产测试的微变形方法学
机译:监测微小共振频率变化的新表征方法:使用未涂覆的基于硅微悬臂梁的传感器进行氢检测时的实验测试
机译:一种用于V波段晶片上测试和表征的新型非接触式介电探针
机译:下一代非接触多普勒雷达的生命体征监测传感器的方法
机译:一项研究范围回顾该研究将药物事件监测系统(MEMS)与测量药物依从性的替代方法进行了比较
机译:非接触式测量和测试技术与新型全硅光学测试和表征方法的比较