Power-Efficient Oscillator-Based Readout Circuit for Multichannel Resonant Volatile Sensors

摘要

This work presents a multichannel electronic nose system that enables a range of novel applications owing to high sensitivity, low form factor and low power consumption. Each channel is based on a combination of doubly-clamped piezoelectric MEMS resonators and CMOS oscillator-based readout designed in TSMC 0.25 $mu{rm m}$ technology. Using “application specific” polymer coatings, the individual resonators can be tuned to detect mixtures of volatile organic compounds (VOCs). This system achieves ppm-level theoretical limit of detection for ethanol which paves the way towards a broad range of applications such as personalized health and environment air quality.