Optomechanical model of surface micromachined tunableoptoelectronic devices

摘要

Linewidth is a critical performance parameter for manynoptoelectronic devices. We have developed a combined optical andnmechanical simulation tool and demonstrate its application tonmicromachined vertical-cavity tunable optoelectronic devices. Thendeformation of the mirror surface is calculated from the area momentnmethod. The optical field distribution is calculated by the Fox-Linmethod, and the diffraction losses are estimated from second-ordernperturbation theory. By comparison to experimental results, we find thatnthe deformation of the central plate is well predicted by our theory.nWhile deformation can be a major source of linewidth broadening in MEMSntunable optoelectronic devices, it is not the primary source in ourndevices