Packaging Technology for Ultra-Small Variable Optical Attenuator Multiplexer (V-AWG) With Multichip PLC Integration Structure Using Chip-Scale-Package PD Array

摘要

We have developed an ultra-small 16-channel variable optical attenuator (VOA) multiplexer (V-AWG) with excellent optical performance by using multichip planar lightwave circuit (PLC) integration technology. The insertion loss is 3.2 dB, and the polarization-dependent loss (PDL) at 25 dB attenuation is less than 0.3 dB. The module size is 90 mm$,times,$55 mm$,times,$14 mm. We describe our concept and developed techniques as regards to the design, fabrication, and packaging of the module, focusing particularly on a chip-scale-packaged monitor photodiode array (CSP-PD) that we developed as a key component of our technique.