A Scalable $1times N$ Optical MEMS Switch Architecture Utilizing a Microassembled Rotating Micromirror

摘要

We present a new architecture for a digitally operated $1times N$ optical microelectromechanical systems (MEMS) switch supporting a large number of output ports. The switch is based on a novel microassembled rotating micromirror mounted on the top of an optimized micromotor using a rotor-pole-shaping technique. The rotating micromirror consists of a novel electrostatic rotary motor, onto which a 3-D micromirror structure is assembled using a robotic-based microassembly process. The rotating micromirror in the switch can digitally rotate with 480 steps per full revolution allowing for excellent and complete repeatability of the switch. A uniform coupling loss of 1.04 dB across all the output fibers is achieved with a maximum switching time of 24 ms at 70 V signal excitation.