Superresolution Digital Image Enhancement by Subpixel Image Translation With a Scanning Micromirror

摘要

This paper reports on a superresolution digital image enhancement technique using subpixel image translation with a scanning micromirror. We demonstrate that the spatial resolution of digital photomicrography, employing typical black-and-white pixelated image sensors, can be improved by acquiring multiple images with predetermined subpixel shifts and combining them with a superresolution image reconstruction algorithm. A two-axis gimbaled micromirror fabricated with a bulk-micromachining process is used to control the translational image displacements with subpixel accuracy.