Modal Properties of 2-D Implant-Defined Coherently Coupled Vertical-Cavity Surface-Emitting Laser Array

摘要

We have investigated the dependence of modal behavior on the structures of 2-D implant-defined coherently coupled vertical cavity surface-emitting laser (VCSEL) arrays experimentally and theoretically. 2-D VCSEL arrays with different interelement spacing have been designed and fabricated. Through the experimental analysis of near-field and far-field distribution, in-phase and out-of-phase mode are obtained from the arrays, depending on the interelement spacing. Considering the effect of thermal and carrier injection, the refractive index distribution of the arrays under operation is calculated. Then, FDTD Solutions software is employed to calculate the near-field distributions of the arrays through establishing a simplified refractive index model. The simulation results agree well with the experiments. Meanwhile, according to the phase characteristics of in-phase and out-of-phase mode, as observed from the near-field profiles, the far-field distributions are calculated, in an excellent agreement with the experiments.