A novel waveguided polarization mode splitter using refractive index changes induced by superlattice disordering

摘要

The operating principle of our polarization mode splitter is based on the polarization-dependent refractive index changes induced by disordering InGaAs/InP superlattices. We disordered superlattices by the Si/sub 3/N/sub 4/ cap-annealing method and measured the near-field patterns to confirm that the device functioned properly at a wavelength of 1.52 /spl mu/m. The crosstalk was about -10 dB. We should be able to improve the characteristics of this device by optimizing its structure. This device requires no electrical control and will be very suitable for semiconductor monolithic integrated circuits.