Ion source plasma parameters measurement based on Langmuir probe with commercial frequency sweep

摘要

Langmuir probe is one of the main diagnostic tools to measure the plasma parameters in the ion source. In this article, the commercial frequency power, which is sine wave of 50 Hz, was supplied on the Langmuir probe to measure the plasma parameters. The best feature of this probe sweep voltage is that it does not need extra design. The probe I-V characteristic curve can be got in less than 5 ms and the plasma parameters, the electron temperature and the electron density, varying with the time can be got in one plasma discharge of 400 ms.