Development of a high repetition rate Nd:YAG slab laser and soft X-ray generation by cryogenic target

S. Amano; A. Shimoura; S. Miyamoto

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Development of a high repetition rate Nd:YAG slab laser and soft X-ray generation by cryogenic target

机译：开发高重复率的Nd：YAG平板激光器并通过低温靶产生软X射线

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High repetition rate (320 pps), high average power (l00 W) pulse Nd:YAG slab laser has been developed for x-ray driver. A strong X-ray emission around 10.8 nm, which wavelength is attractive for x-ray projection lithography, was generated from cryogenic Xe targets pumped by this laser pulses. CO_2 and H_2O were also tested for cryogenic targets and we found that the emission intensity from Xe around this wavelength region was at least 10 times higher than that from H_2O, CO)2..

机译：已经为X射线驱动器开发了高重复率（320 pps），高平均功率（100 W）脉冲Nd：YAG平板激光器。由该激光脉冲泵浦的低温Xe靶产生了大约10.8 nm的强X射线发射，该波长对于X射线投影光刻很有吸引力。还测试了CO_2和H_2O的低温目标，我们发现该波长区域附近Xe的发射强度比H_2O，CO）2的发射强度高至少10倍。

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来源
《Fusion Engineering and Design》 |1999年第1999期|p.423-426|共4页
作者
S. Amano; A. Shimoura; S. Miyamoto;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类原子能技术;
关键词
LPX; Slab laser; PC-MOPA; Xe cryogenic target;

机译：LPX;平板激光器PC-MOPA;Xe低温靶;
入库时间 2022-08-18 00:35:48

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1. Development of a high repetition rate Nd:YAG slab laser and soft X-ray generation by cryogenic target [J] . S. Amano, A. Shimoura, S. Miyamoto Fusion Engineering and Design . 1999,第期

机译：开发高重复率的Nd：YAG平板激光器并通过低温靶产生软X射线
2. Laser plasma cryogenic target on translating substrate for generation of continuously repetitive EUV and soft X-ray pulses [J] . Amano Sho Review of Scientific Instruments . 2014,第6期

机译：在平移基板上的激光等离子体低温靶，用于产生连续重复的EUV和软X射线脉冲
3. Efficient generation of 200 mJ nanosecond pulses at 100 Hz repetition rate from a cryogenic cooled Yb:YAG MOPA system [J] . Stuart Pearce, Ryo Yasuhara, Akira Yoshida, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2009,第11期

机译：从低温冷却的Yb：YAG MOPA系统以100 Hz重复频率高效生成200 mJ纳秒脉冲
4. Laser-plasma x-ray source by cryogenic target and high-repetition-rate slab YAG laser [C] . Takayasu Mochizuki Conference on high-power lasers in energy engineering . 2000

机译：通过低温靶和高重复速率平板yag激光激光等离子体X射线源
5. Saturated high repetition rate soft x-ray lasers. [D] . Wang, Yong. 2007

机译：饱和的高重复频率软X射线激光器。
6. Ultra-high-resolution inelastic X-ray scattering at high-repetition-rate self-seeded X-ray free-electron lasers [O] . Oleg Chubar, Gianluca Geloni, Vitali Kocharyan, -1

机译：高重复率自种X射线自由电子激光器的超高分辨率非弹性X射线散射
7. Generation of millijoule-level soft X-ray laser pulses at 4 Hz repetition rate in a highly saturated table-top capillary discharge amplifier [O] . J.J. Rocca, B.R. Benware, C.D. Macchietto, -1

机译：在高度饱和的台式毛细管放电放大器中以4 Hz重复速率产生毫ij级软X射线激光脉冲
8. Test Results for 320 NM and 390 NM Remote Sensing Sources Using a 150 mJ, 100 Hz Repetition Rate, Injection-Seeded Iiode-Pumped Nd:YAG Slab-Laser Developed by Coherent Technologies, Inc [R] . Armstrong, D. J. 2005

机译：使用150 mJ，100 Hz重复率，注入种子的Iiode泵浦Nd：YaG平板激光器测试320 Nm和390 Nm遥感源的测试结果，由Coherent Technologies，Inc开发

Development of a high repetition rate Nd:YAG slab laser and soft X-ray generation by cryogenic target

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