Mikromechanische (MEMS) Schalter fuer Millimeterwellen-Systeme in KFZ-Rundumsichtanwendimgen

摘要

In recent years, great advances have been made in the field of silicon millimeter-wave integrated circuits (SIMM-WIC) as well as in microsystems technology. These developments jointly allow the preparation of microme-chanical capacitive switches, which exhibit excellent RF properties far into the millimeter-wave frequency range. This paper presents coplanar bridge and longitudinal switches and discusses their applicability for automotive surround sensing system. It comprises a detailed review of RF properties in addition to an introduction to the systems background. Further, aspects are treated which are important for the application, as mechanical prop-erties, reliability, and packaging and mounting technologies. Finally, the potential for further systems integration will be shown.