Systemintegration von Mikrowellen Schottky-Mischern und MEMS-HF-Schaltern

摘要

In recent years, great advances have been made in the field of silicon millimeter-wave integrated circuits (SIMM-WIC) as well as in Microsystems technology. This paper presents a integration concept for microwave Schottky-Mixer and MEMS-RF-Switchers. Beneath the integration concept and the fabrication process will be the characterization of the Schottky-diodes also as the requirements for an "zero-bias"- and the MOTT-mode elucidated.