INDUSTRY UPDATE

摘要

Veeco Instruments announced that Vee-co CNT, formerly known as Ultratech/ Cambridge Nanotech, has shipped its 500th atomic layer deposition (ALD) system. The 500th system—the Fiji G2TM ALD system—went to North Carolina State University and will enable the university to perform a variety of research applications for next-generation electronic devices, including high-performance wearables and sensors. "The Veeco CNT Fiji G2 ALD system will be a critical tool to meet our research goals," said Bongmook Lee, Ph.D., research assistant professor of the NSF NERC ASSIST Center at North Carolina State University. "This ALD tool enables advances in our research for high-performance CMOS, nonvolatile memory, next-generation wide bandgap power devices, and environmental and physiological sensors. We selected the Veeco CNT Fiji G2 for its demonstrated capability to reliably deposit the most challenging oxide and nitride thin films."