Cushioning the Pressure Vibration of a Zeolite Concentrator System Using a Decoupled Balancing Duct System

摘要

A honeycomb Zeolite Rotor Concentrator (HZRC) is the main air pollution control device utilized by many semiconductor and optoelectronics manufacturers. Various plant exhaust streams are collected and then transferred to the HZRC for decontamination. In a conventional HZRC, the exhaust fan movement and the switching between different air ducts can cause significant duct pressure variations resulting in production interruption. The minimization of pressure fluctuations to ensure continuous operation of production lines while maintaining a high volatile organic compounds (VOCs) removal efficiency is essential for exhaust treatment in these high technology manufactures. The article introduces a decoupled balancing duct system (DBDS) for controlling the airflows to achieve a balanced pressure in the HZRC system by adding a flow rate control device to the VOCs loaded stream bypass duct of a conventional system. Performance comparisons of HZRC with DBDS and other air flow control systems used by the wafer manufacturers in Hsinchu Science Park, Taiwan are presented. DBDS system had been proved effectively to stabilize the pressure in the airflow ducts, and thus avoided pressure fluctuations; it helped to achieve a high VOCs removal efficiency while ensuring the stability of the HZRC.