Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers

摘要

The fabrication and characterisation of two-dimensional phase-locked arrays of vertical cavity surface emitting lasers is reported. The three two-dimensional array structures characterised were a 2*3 periodic array of 10 mu m/sup 2/ lasers, a hexagonal array and a centred hexagonal array of 5 mu m hexagonal lasers. All arrays were fabricated using the same technique which was a combination of mesa etching and oxygen implantation isolation.