DC electroluminescence from PECVD grown thin films of silicon-rich silica

Trwoga P.F.; Kenyon A.J.

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DC electroluminescence from PECVD grown thin films of silicon-rich silica

机译：PECVD生长的富硅二氧化硅薄膜的直流电致发光

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来源
《Electronics Letters》 |1996年第18期|共页
作者
Trwoga P.F.; Kenyon A.J.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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1. Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films [J] . A.-S. Keita, A. En Naciri, F. Delachat, Thin Solid Films . 2011,第9期

机译：快速热退火富硅氮化硅膜中PECVD生长的硅纳米级夹杂物的介电功能
2. Annealing temperature dependence of photoluminescent characteristics of silicon nanocrystals embedded in silicon-rich silicon nitride films grown by PECVD [J] . D.S. Chao, J.H.Liang Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2013,第jula15期

机译：PECVD生长的富硅氮化硅薄膜中嵌入的硅纳米晶体光致发光特性的退火温度依赖性
3. DC and AC electroluminescence in silicon nanoparticles embedded in silicon-rich oxide films [J] . Morales-Sanchez A, Barreto J, Dominguez C, Nanotechnology . 2010,第8期

机译：嵌入富硅氧化物薄膜中的硅纳米颗粒中的直流和交流电致发光
4. Characterisation and Comparison of Diamond-Like Carbon Thin Films Deposited by RF-PECVD and Pulsed-DC Hollow Cathode PECVD [C] . R. Birney, F. Placido, J. Kavanagh Society of Vacuum Coaters annual technical conference . 2011

机译：RF-PECVD和脉冲DC中空阴极PECVD沉积类金刚石薄膜的特性与比较
5. Control and design of critical properties of PECVD carbon doped low-k silica thin films by deposition methods and film thickness. [D] . Zhou, Hong. 2002

机译：通过沉积方法和膜厚控制和设计PECVD碳掺杂低k二氧化硅薄膜的关键性能。
6. Transfer-Free Graphene-Like Thin Films on GaN LED Epiwafers Grown by PECVD Using an Ultrathin Pt Catalyst for Transparent Electrode Applications [O] . Fangzhu Xiong, Weiling Guo, Shiwei Feng, 2019

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机译：基于通过RF-PECVD在165°C下生长的外延膜的薄晶硅太阳能电池

DC electroluminescence from PECVD grown thin films of silicon-rich silica

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