Focused ion beam tuning of in-plane vibrating micromechanical resonators

摘要

Strategies for permanently tuning the resonant frequency of in-plane micromechanical resonators are compared. It is shown that tuning of the suspension stiffness may have advantages compared with tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated.