GaAs/AlGaAs quantum cascade micro lasers based on monolithic semiconductor-air Bragg mirrors

摘要

Edge emitting GaAs-based quantum cascade micro lasers at a wavelength of 9 μm were realised by monolithic integration of photonic bandgap mirrors based on deeply etched air-semiconductor Bragg gratings. The shortest operating device with Bragg mirrors on both sides has a cavity length of 180 μm.