Development of nanostructures for thermoelectric microgenerators using ion-track lithography

摘要

A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon micro-fabrication techniques, electroplating and submicron ion-track nano-lithography, is discussed. Ion-track etched polyimide nanotemplates (30-80 nm pore diameters) are used to grow Bi_2Te_3 nanowires by electroplating. The Bi_2Te_3 film's microstructural and thermoelectric properties are reported.