Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators

摘要

The performance of micromechanical Lame?′-mode square resonator designs with different geometric parameter variations in structural layer thickness, length of anchor beams and the number of anchors placed at nodal points, is reported. Measured results reveal that there is an optimal range of anchor designs that provide high quality factor (Q) above one million, along with low motional resistance, Rm. Two-anchor- only support design is able to achieve very high Qs but results in higher motional resistance. Lower structural thickness generally reduces the quality factor Q and Rm owing to interference from out-of- plane modes.