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Enhancement of optical properties for CdTe absorber through improving thickness uniformity by CMP process

机译:通过CMP工艺提高厚度均匀性来增强CdTe吸收体的光学性能

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摘要

The enhanced optical properties including absorbance of cadmium telluride (CdTe) thin film as an absorber in heterojunctioned solar cells were experimentally obtained by the chemical mechanical planar-isation (CMP) process after sputtering deposition, which had been caused by improving the thickness uniformity of the as-deposited CdTe thin film.
机译:在溅射沉积后,通过化学机械平面化(CMP)工艺,通过实验获得了增强的光学特性,包括在异质结太阳能电池中作为吸收剂的碲化镉(CdTe)薄膜的吸收性,这是由于提高了厚度的均匀性而导致的。沉积的CdTe薄膜。

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  • 来源
    《Electronicsletters》 |2010年第14期|P.1019-1021|共3页
  • 作者

    N.-H. Kim; Y.-O. Choi; W.-S. Lee;

  • 作者单位

    The Research Institute for Catalysis, Chonnam National University, Gwangju 500-757, Republic of Korea;

    rnDepartment of Electrical Engineering, Chosun University, Gwangju 501-759, Republic of Korea;

    rnDepartment of Electrical Engineering, Chosun University, Gwangju 501-759, Republic of Korea;

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