机译:集成有金属结构的AlN薄膜声表面波谐振器
Univ. of Electron. Sci. & Technol. of China, Chengdu, China;
aluminium compounds; sputter deposition; surface acoustic wave resonators; thin film devices; titanium alloys; wide band gap semiconductors; AlN; TC4 titanium alloy substrates; aluminium nitride thin films; electromechanical coupling coefficient; frequency 129 MHz; integrated SAW resonator; metal structure health monitoring; metal substrate; midfrequency magnetron sputtering; resonance frequency; strain sensor; surface acoustic wave resonator;
机译:复合谐振腔结构中AlN薄膜的性能表征
机译:底部电极对AlN基FBAR中AlN薄膜取向和谐振器频率响应的影响
机译:通过PLD沉积用于表面声波的AlN,ZnO薄膜和AlN / ZnO或ZnO / AlN多层结构
机译:在Si和用于MEMS谐振器的电极上溅射AlN薄膜:表面质量微观结构与薄膜性能之间的关系
机译:AlN薄膜体声波谐振器的制作与表征。
机译:固态安装谐振器应用中通过脉冲激光处理的退火AlN薄膜的晶体特性
机译:与AlN轮廓模式谐振器单片集成的压电AlN RF MEMS开关的双光束驱动
机译:基于具有倾斜c轴取向的alN,ZnO和GaN薄膜的双模薄膜体声波谐振器(FBaR)