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Magnetostrictive Properties of Tb-Fe and Tb-Fe-Co Films

机译:Tb-Fe和Tb-Fe-Co薄膜的磁致伸缩性能

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We studied Tb-Fe-Co giant magnetostrictive thin films and researched sputtering conditions to improve their magnetostrictive properties and investigated the possibility of their practical use. The sputtering Ar gas pressure influenced their inner stress and played a very important role for the determination of the magnetic easy axis. The largest magnetostriction was obtained when the Ar gas pressure was set at 0.7 Pa and the inner stress was controlled at a tensile stress of about 50 MPa. In the Tb-Fe system, the Curie temperature is very low (about 140 ℃) compared with bulk materials, but the Curie temperature can be improved with increasing Co ratio. For films over 70% Co ratio, the Curie temperature was more than 250 ℃ and the largest magnetostriction (1508 ppm) was obtained at 80.1 % Co ratio. For almost all Tb-Fe-Co thin films, the values of magnetostriction were very high (over 1000 ppm), and the coercive forces were low (around 8 kA/m). Therefore, the Tb-Fe-Co giant magnetostrictive thin films are very appropriate materials for the applications in micro-actuators and sensors.
机译:我们研究了Tb-Fe-Co巨型磁致伸缩薄膜,并研究了溅射条件以改善其磁致伸缩性能,并研究了其实际应用的可能性。溅射氩气压力影响其内应力,在确定易磁化轴方面起着非常重要的作用。当将Ar气压设置为0.7Pa并且将内应力控制在约50MPa的拉伸应力时,获得最大的磁致伸缩。在Tb-Fe系统中,与块状材料相比,居里温度很低(约140℃),但是随着Co比的增加,居里温度可以提高。对于Co比率超过70%的薄膜,居里温度超过250℃,并且Co比率为80.1%时可获得最大的磁致伸缩(1508 ppm)。对于几乎所有的Tb-Fe-Co薄膜,磁致伸缩值非常高(超过1000 ppm),而矫顽力很低(大约8 kA / m)。因此,Tb-Fe-Co巨型磁致伸缩薄膜是非常适合用于微执行器和传感器的材料。

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