Ultra-Miniature Optical Fiber Pressure Sensor with a Sleeve for Catheter Insertion

摘要

A diaphragm-type optical fiber pressure sensor, which has a sleeve for fiber insertion, is proposed, and the fundamental characteristics of this sensor are demonstrated. The sleeve structure is fabricated by DRIE (Deep Reactive Ion Etching). The diaphragm with a sleeve is suitable for highly reliable and easy bonding between the sleeve and the optical fiber. The light intensity change detection by the Fabry-Perot interferometer based on the pressure is increased by the improved DRIE method. The mass production method of the developed diaphragm will be useful for creating a low-cost pressure sensor.