EXAMINATION OF PHYSICAL AND CHEMICAL PROPERTIES OF THIN LAYERS OF ARSENIC-SILICON GLASSES BY MEANS OF AN X-RAY MICROPROBE

摘要

The paper presents results of tests carried out by means of an X-ray of arsenic-silicon glass produced by means of spin-method. The analysis of spectrograms proved the existence of some areas of an increased content of dopants in glass, which can result in the heterogeneity of diffusion layer parameters.