ION-BEAM MODIFICATION OF SURFACE GEOMETRICAL PROPERTIES OF MATERIALS

摘要

In this short review article several important problems relating to ion-beam modification of surface geometrical properties of materials, especially surface roughness alteration and formation of topo- graphical elements, are presented. First, the influence of ion bombarment conditions on main roughness parameters (vertical: R_a, R_z, R_m and horizontal S_m) is shown. Because alteration of roughness is inevitable connected with surface topography changes, i. e. with generation of new topographical elements and/or vanishing of the others, this issue is also considered here.