Thin-film Shielded Loop Coil for Magnetic Near Field Measurement of High Densely Packaged PCBs

摘要

This paper describes a new miniature thin-film coil whose area is down to 25μm x 110μm to sense magnetic near field from PCBs(Printed Circuit Boards) of Ics. The proposed coil has multi-layer planarshielded looop structure and it is insensitive to electric field. Spatial resolution of 300μm was obtained using the coil at 800MHz.This value is 4.3times better than the PCB-made type we have already presented. Magnetic field distribution near the LSI packagedonPCB has been demonstrated.