Probe diagnostics of plasma in an electron cyclotron resonance ion source with a magnetic field generated by permanent magnets

摘要

An electron cyclotron resonance (ECR) ion source for a large area uniform ion beam with multipolar magnetic fields is being developed. Hot electrons heated at the localized ECR region in the source ionize a large volume of gas in the discharge chamber, where a large area plasma is generated and the plasma loss is suppressed with the multipolar magnetic field. The electron energy and current distributions are measured with Langmuir probes to confirm the above plasma generation scheme.