Recently, electromagnetically driven microactuators have attracted interest because of their availability. We have been studying magnetically driven actuators. This time, a magnetically driven linear microactuator using microsystem fabrication techniques has newly developed. The microactuator is composed of a mobile microplatform (move) with some permanent magnets and a stator with a large number of planar coils. The planar coils of the stator are made by using photolithography technique and electroless plating technique.
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