Observation of microdischarges in high-frequency silent discharge and improvement of ozone generation efficiency

摘要

The microdischarge dynamics of high-frequency silent discharge has been studied to improve the ozone generation efficiency. The silent discharges in oxygen atmosphere were generated using a parallel-electrode type and a screw-electrode type geometries. The electric power generators of frequencies of 50kGz, 10kHz and 60Hz were utilized. The ICCD measurement showed that the number of the microdischarge with average diameter of 100μm and average current of 0.65mA increases with the applied voltage.