Acoustics on small scales: Modelling viscous effects in MEMS devices

摘要

We present a modelling strategy based on the finite element method to describe flexible, piezoelectric structures surrounded by a compressible fluid, including viscosity. Non-conforming interfaces based on the Mortar method are used to couple the different physical domains. Finally, we present an application example of a piezoelectrically actuated MEMS structure to illustrate the modeling procedure and the impact of viscous effects.