Detect GMR defects early with in-line metrology

摘要

Recently, a class of metallic multilayer films exhibiting the giant magnetoresistive (GMR) effect has gained considerable attention for use as read heads for both hard-disk and magnetic-tape drives. GMR-effect read sensors exhibit an MR ratio, ΔR/R, which is typically 8% or higher, as compared with 2% for advanced magnetoresistive (AMR) read heads. The increased sensitivity of GMR devices allows a decrease in the read element track width; as a result, track density and, ultimately, storage density can be increased.