MEMS AC voltage reference for miniaturized instrumentation and metrology

摘要

This work explores MEMS (Micro-Electro-Mechanical Systems) potentialities to fabricate AC voltage references through mechanical-electrical transduction that could be used for high precision electrical metrology and for applications in miniaturized instrumentation. AC voltage reference ranging from 5 V to 90 V have been designed and fabricated using the same Epitaxial Silicon On Insulator (SOI) surface micromachining process allowing an accurate control of both dimensions and material properties. The measured MEMS AC voltage reference values have been found in a good agreement with CoventorWare calculations. These tests structures have also been used to develop the read-out electronics to drive the MEMS.