Young's modulus measurements of nanohoneycomb structures by flexural testing in atomic force microscopy

摘要

This paper determines the Young's modulus of nanohoneycomb structures by flexural testing in an atomic force microscope (AFM). Since the cross-sectional area of nanohoneycomb structures varies along the structure, the area moment of inertia is not a constant. The area moment of inertia is also influenced by the porosity of the nanohoneycomb structure. An anodic aluminum oxide (AAO) film is fabricated as a nanohoneycomb structure. Young's modulus of the AAO film, measured from the results of flexural testing in AFM, is in good agreement with the results of tensile tests in a Nano-UTM (universal testing machine).