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EnFACE: a maskless process for circuit fabrication

机译:EnFACE:电路制造的无掩模工艺

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摘要

Purpose - The purpose of the paper is to present an update and the latest results from work on a project which could be useful for maskless printedrncircuit board (PCB) manufacturing.rnDesign/methodology/approach - Copper is plated and etched using a novel electrochemical technique, electrochemical patterning by flow andrnchemistry, using a masked tool and fully exposed substrate. The micro patterns on the tool are replicated on the substrate via optimum design of thernapparatus, choice of electrolyte chemistry and fluid flow.rnFindings - Linear and square shapes ranging from 5 to 200 μm are transferred using the technique by electrochemical plating and etching. Up torn25 substrates could be processed using a single tool, which indicates that photolithography requirements can be greatly minimised.rnResearch limitations/implications - The copper lines are transferred to relatively small substrates. The process needs to be scaled up tornaccommodate larger substrates in order to fully exploit its potential for PCBs.rnOriginality/value - The paper presents a fundamentally different approach to transfer micron scale pattern using a maskless technology. The platformrntechnology involves using a mask to pattern each substrate; this work shows that micron scale patterns can be transferred without masking byrnoptimising electrochemical reactor technology.
机译:目的-本文的目的是介绍一个项目的更新和最新结果,这可能对无掩模印刷电路板(PCB)的制造有用。设计/方法/方法-使用新型电化学技术镀铜和蚀刻铜使用掩膜工具和完全暴露的基材,通过流化学方法进行电化学图案化。通过对设备进行最佳设计,选择电解液化学成分和流体流量,可将工具上的微图案复制到基板上。发现-使用电化学电镀和蚀刻技术,可将5至200μm的线性和正方形形状转移。单个工具最多可以处理25个衬底,这表明可以大大降低光刻要求。研究限制/意义-铜线转移到相对较小的衬底上。该工艺需要扩大规模以适应更大的基板,以便充分利用其在PCB方面的潜力。原创性/价值-本文提出了一种使用无掩模技术转移微米级图案的根本不同方法。平台技术涉及使用掩模对每个基板进行图案化;这项工作表明,通过优化电化学反应器技术,可以在不掩盖的情况下转移微米级图案。

著录项

  • 来源
    《Circuit World》 |2009年第3期|8-11|共4页
  • 作者

    Sudipta Roy;

  • 作者单位

    School of Chemical Engineering and Advanced Materials, Newcastle University, Newcastle upon Tyne, UK;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    electrodeposition; copper; printed circuit boards; substrates;

    机译:电沉积铜;印刷电路板;基材;
  • 入库时间 2022-08-18 01:19:19

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