Microsystems Technology (MST) And MEMS Applications: An Overview

摘要

Microelectromechanical systems (MEMS), microsystems technology (MST), and micro- machines are roughly synonymous terms applied in the United States, Europe, and Japna, respectively, for manufacturing Technologies that are enabling miniaturi- Zation and the development of useufl Products. MST is the second micromanu- Facturing revolution, semiconductor manu- Facturing being the first.