Preparation and characterization of LaNiO₃ films grown by metal-organic deposition

摘要

We have investigated the synthesis and characterization of LaNiO₃ (LNO) layers deposited on YSZ (100) substrate by metal-organic deposition (MOD). Texture, morphology and electrical properties of the LaNiO₃ films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM) and electrical resistivity measurement. It has been found that the formation of (h00) orientation depends on pyrolysis temperature, annealing temperature and thickness of LaNiO₃ layers. The LaNiO₃ films prepared under optimal condition indicate highly (h00) orientation and a rather smooth surface. The LaNiO₃ films show a metallic behaviour in the measured temperature range.