MECHANISM OF THE GROWTH, NUCLEATION, AND HETEROEPITAXY OF METASTABLE DIAMOND FILMS ON ATOMIC SCALE

摘要

The mechanism of chemical-vapor-deposited (CVD) diamond film growth has attracted in- creasing attention recent years, mainly due to the fact that further technological advancement (such as obtaining high-quality films, controlling film growth, and heteroepitaxial growth, etc.) requires a more detailed understanding of the fundamental phenom- ena responsible for diamond growth.