Synchrotron radiation irradiation effects on low-temperature condensed layer of dimethyl aluminum hydride on SiO_2 surface

摘要

The synchrotron radiation (SR) irradiation effects on the low temperature condensed layer of dimethyl aluminum hydride (DMAH) were investigated by infrared reflection absorption spectroscopy, quadrupole mass spectroscopy with neutral desorbed species, and x-ray photoelectron spectroscopy (XPS). Both photo-thermal effect and photo-decomposition reaction are induced by SR irradiation. The DMAH dimer forms are changed to trimer by the photo-thermal effects in the condensed layer. The C/Al ratio which is an important parameter of the Al thin film deposition is substantially decreased from the value of the as-deposited layer by SR photo-decomposition but not so much by MgK_a irradiation decomposition.