Interface roughness and density characterization of multilayer mirrors by using x-ray standing waves

摘要

Although methods of fabricating multilayers for soft x-ray mirrors have recently been developed, problems such as roughness and density errors still need serious consideration. The traditional way to characterize the properties of multilayer mirrors has been by small angle x-ray scattering, TEM, and optical methods. However, even with these techniques, the dependence of reflectivity on interface roughness and the density of each layer has not been understood clearly, owing to the high sensitivity of reflectivity to several parameters.