Platinum Carbon Multilayer Grating : Preparation and Characterization

摘要

Platinum carbon (Pt/C) multilayer were deposited on silicon carbide (SiC) grating using an electron beam evaporation system. The bare SiC substrate and SiC grating were characterized by soft x-ray reflectivity measurements before coating with Pt/C multilayer. Reflectivity and dispersion efficiencies of multilayer grating were measured using characteristic x-rays and synchrotron radiation.