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A profilometer for Synchrotron Radiation Mirrors

机译:同步辐射镜的轮廓仪

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摘要

A profilometer for measuring surface figures of large-size aspheric mirrors was constructed on the basis of the Twyman-Green interferometer with heterodyne phase detection method. By using overlapping measurement method, surface profiles of a cylindrical mirror 1000 mm in length were evaluated within the designed accuracy.
机译:基于外差相位检测方法的Twyman-Green干涉仪,构建了用于测量大型非球面镜表面轮廓的轮廓仪。通过使用重叠测量方法,在设计精度内评估了长度为1000 mm的圆柱镜的表面轮廓。

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