The BF-SPIder has enabled automatic zero point extraction through the combination of two-dimensional (2D) and three-dimensional (3D) images using two kinds of LED lights. This function has enabled highspeed inspection at 0.3ms/FOV. By developing Gerber data, inspection data can be automatically created easily in a short time. Through adoption of the PMP 3D BASIC THEORY (PHASE MEASUREMENT PROPHILOMETER), the BF-SPIder has achieved highly accurate repeatability and reproducibility. It has achieved ±l%(3o) in height and ±l%(3o) in volume. Gage repeatability and reproducibility (GR&R) is less than 10%. Hence, the BF-SPIder enables measurement and inspection based on high reproducibility.
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