SAM CO's Plasma Dry Etching System Suits Asian Market

摘要

Japan-based SAMCO Inc. has developed and released the RIE-33HPC plasma dry etching system exclusively for the Asian markets. SAMCO has thoroughly reexamined the design of its plasma dry etching system and adopted Chinese-, Korean- and Taiwanese-made components for the main components that include vacuum components, high-frequency power supplies, and dry pumps. The company has also installed these components to locally made machines to drastically reduce costs. As a result, SAMCO has successfully reduced the equipment price, while maintaining the processing capacity equivalent to that of the RIE-330iPC, the company's existing machine.