Fabrication of BaSnO_3 thin films on SiO_2 glass substrates using excimer laser-assisted metal organic decomposition

摘要

The perovskite oxide BaSnO3 has received much attention because of its excellent electronic properties for use in electronic devices such as solar cells. In this study, BaSnO3 thin films were successfully deposited onto SiO2 glass substrates using excimer laser-assisted metal organic decomposition (ELAMOD). The films could not be obtained using the thermal decomposition process because Ba reacts readily with a SiO2 substrate. Results of a transmission electron microscopy and numerical simulation of heat generation and transfer under laser irradiation revealed local and rapid generation of heat in the ELAMOD process resulting in a suppression of the reaction between Ba and SiO2 and hence enabling BaSnO3 thin film formation on SiO2 substrates.