Using SIMS and the NIST standard reference material #2137 to calibrate standards used in the ~(11)B(p,α)~8Be nuclear reaction analysis of B in Si

摘要

Two different methods of using SIMS have been utilized in confirming the dose of a ~(11)B implanted Si reference material that has been used for many years in determining doses of ~(11)B ion-implanted into silicon using the ~(11)B(p, α)~8Be nuclear reaction analysis technique. Both methods are based on the NIST SRM 2137. One method uses a B bulk-doped Si sample to transfer the calibration from the ~(10)B of the NIST SRM to the ~(11)B of the NRA standard. The other method uses two identical implants, one of ~(10)B and one of ~(11)B to accomplish the calibration transfer. The dose of the NRA standard was found to be within 5% of the quoted dose for the standard that had been used for years.