A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications

R. Gibbons; M.G. Dowsett; J. Kelly; P. Blenkinsopp; R. Hill; D. Richards; N. Loibl

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A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications

机译：浮动低能电子枪（FLEG），用于SIMS和其他应用中的电荷补偿

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摘要

A floating low energy gun (FLEG) has been developed for charge neutralization in the SIMS analysis of insulating specimens. The FLEG has been characterized, and its effectiveness at low beam energies on fragile insulating samples has been compared with the performance of conventional electron guns.

机译：开发了一种浮动式低能电子枪（FLEG），用于绝缘样品的SIMS分析中的电荷中和。 FLEG已被表征，并将其在易碎绝缘样品上的低束能量下的有效性与常规电子枪的性能进行了比较。

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来源
《Applied Surface Science》 |2003年第1期|p.343-347|共5页
作者
R. Gibbons; M.G. Dowsett; J. Kelly; P. Blenkinsopp; R. Hill; D. Richards; N. Loibl;
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作者单位

Advanced SIMS Projects, Department of Physics, University of Warwick, Coventry CV4 7AL, UK;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
SIMS; charge neutralization; low energy gun; FLEG;

机译：SIMS;电荷中和;低能喷枪;FLEG;

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A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications

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