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Chemical composition of dome-shaped structures grown on titanium by multi-pulse Nd : YAG laser irradiation

机译:多脉冲Nd:YAG激光辐照在钛上生长的圆顶形结构的化学成分

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The specific dome-shaped structures were grown by multi-pulse Nd:YAG (lambda = 1.064 mum, tau = similar to300 ns, and v = 30 kHz) laser irradiation of titanium targets in air at atmospheric pressure. The laser intensity values were chosen below the single-laser-pulse melting threshold of titanium. The chemical composition of the structures was studied as a function of laser pulse number as well as laser intensity, both at the outer surface layer and in depth. Micro-Raman spectroscopy, Auger electron spectroscopy (AES), and wavelength dispersive X-ray spectroscopy (WDX) were used as diagnostic techniques. Morphological investigations were performed by scanning electron microscopy. The obtained results revealed a lower oxygen concentration in the centre of the structures as compared to the borders and a lower concentration on the surface than in the depth. Moreover, it was found that the stoichiometry of the formed TiO2-x oxides increases from the structures centre towards the border and from the surface towards the depth. (C) 2003 Elsevier B.V. All rights reserved. [References: 29]
机译:通过在大气压力下在空气中对钛靶材进行多脉冲Nd:YAG(λ= 1.064 mum,tau =类似于300 ns,v = 30 kHz)的激光辐照来生长特定的圆顶形结构。选择的激光强度值低于钛的单激光脉冲熔化阈值。研究了在外表面层和深度上,结构的化学组成与激光脉冲数以及激光强度的关系。显微拉曼光谱,俄歇电子能谱(AES)和波长色散X射线能谱(WDX)被用作诊断技术。通过扫描电子显微镜进行形态学研究。获得的结果表明,与边界相比,结构中心的氧浓度更低,而与深度相比,表面的氧浓度更低。此外,发现形成的TiO 2 -x氧化物的化学计量从结构中心向边界和从表面向深度增加。 (C)2003 Elsevier B.V.保留所有权利。 [参考:29]

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