Gravimetric and profilometric measurements of the ablation rates of photosensitive polymers at different wavelengths

摘要

The ablation rates of two polyimides (PMDA and Durimid™) and one triazene polymer were studied by gravimetric (quartz microbalance) and profilometric (profilometer) methods at irradiation wavelengths of 193, 248 and 308 nm. The ablation rates determined by the two methods are discussed in the context of the absorption behavior of the materials. Furthermore, the consistence of the two experimental methods is discussed for the ablation rates of Durimid™ and the triazene polymer. The gravimetric measurements revealed a good correlation between the ablation rate and the absorption properties of the examined materials. The comparison of the gravimetric and the profilometric measurements suggest a significant mass removal, e.g. by formation of gaseous products, prior to the detection of changes in the surface morphology.